1. NanoPTH Mittelhessen University of Applied Sciences Giessen 35390 Germany
2. Dresden Integrated Center for Applied Physics and Photonic Materials (IAPP) and Institute for Applied PhysicsTechnische Universität Dresden Dresden 01062 Germany
3. Leibniz‐Institut für Polymerforschung Dresden e.V. (IPF) Dresden 01069 Germany
4. Institute of Ion Beam Physics and Materials ResearchHelmholtz‐Zentrum Dresden‐Rossendorf Dresden 01328 Germany