Affiliation:
1. Key Lab of Polar Materials and Devices (MOE) and Department of Electronics East China Normal University Shanghai 200062 China
2. School of Microelectronics and Key Laboratory of Computational Physical Sciences (MOE) Fudan University Shanghai 200062 China
Abstract
AbstractUsing ab initio molecular dynamics (AIMD), the cascade collision process in GaN irradiated by low‐energy electron beam and the temperature effect on the threshold displacement energy (TDE) are investigated. The temperature effect of the TDE is found to exhibit different patterns for Ga and N primary knock‐on atoms (PKAs). In the considered energy range of initial kinetic energy (40 to 80 eV), displacements induced by Ga PKA show high uncertainty, i.e., the TDE energy strongly depends on the initial configurations, and kinetic energies higher than TDE does not ensure the displacements that form defects. On the contrary, temperature shows relatively small effect on its TDE and displacement induced by N PKAs, which can essentially occur when the PKA kinetic energy is higher than the TDE. Such different effects are possibly due to the different atomic radii of the two elements and the different energy barriers to overcome. Ga PKAs, which have larger atomic radii, are relatively difficult to stabilize in the crystal and tend to relax to its original position with the assistance of thermal vibrations, and vice versa for N PKAs. The simulation results provide a new understanding of TDE and the cascade collisions of PKAs in GaN at finite temperatures, which can be instructive for improving the radiation resistance of GaN devices.
Funder
National Natural Science Foundation of China
Science and Technology Commission of Shanghai Municipality
Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning
Key Technologies Research and Development Program