Chemical Infiltration during Atomic Layer Deposition: Metalation of Porphyrins as Model Substrates
Author:
Publisher
Wiley
Subject
General Chemistry,Catalysis
Reference28 articles.
1. Atomic Layer Deposition on Biological Macromolecules: Metal Oxide Coating of Tobacco Mosaic Virus and Ferritin
2. Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials
3. Area selective atomic layer deposition of titanium dioxide: Effect of precursor chemistry
4. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
5. Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition
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