PLD Epitaxial Thin‐Film BaTiO3 on MgO − Dielectric and Electro‐Optic Properties

Author:

Winiger Joel1ORCID,Keller Killian1,Moor David1,Baumann Michael1,Kim Donghoon2,Chelladurai Daniel1,Kohli Manuel1,Blatter Tobias1,Dénervaud Eric3,Fedoryshyn Yuriy1,Koch Ueli1,Pané Salvador2,Grange Rachel3,Leuthold Juerg1

Affiliation:

1. ETH Zurich D‐ITET Institute of Electromagnetic Fields Gloriastrasse 35 Zurich 8092 Switzerland

2. ETH Zurich D‐MAVT Institute of Robotics and Intelligent Systems Tannenstrasse 3 Zurich 8092 Switzerland

3. ETH Zurich D‐PHYS Institute for Quantum Electronics Optical Nanomaterial Group Auguste‐Piccard‐Hof 1 Zurich 8093 Switzerland

Abstract

AbstractThe study demonstrates high‐quality pulsed‐laser‐deposited (PLD) barium titanate (BTO) thin‐films on a magnesium oxide substrate. The frequency response of the relative permittivity (dielectric constant) and the linear electro‐optical coefficient (Pockels coefficient) are measured. At 0.2 GHz, the Pockels coefficient is fitted to be r42 ≈ 1030 pm V−1. It decreases to ≈390 pm V−1 at 10 GHz after which it remains constant up to 70 GHz. The unbiased BTO permittivity is measured to be εa ≈ 7600 at 0.2 GHz, dropping to ≈1100 at 67 GHz, while the biased BTO  had a permittivity εa ≈ 2000 at 0.2 GHz, dropping to ≈500 at 67 GHz. These results fill an important experimental characterization gap for high‐speed BTO applications and show the high quality of PLD‐grown BTO films. Lastly, the material's crystalline quality is characterized and the domain distribution is imaged. The findings enable the design and fabrication of a new generation of BTO‐based components for sensing and communications.

Funder

HORIZON EUROPE Framework Programme

Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials

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