P‐178: Flexible AMOLED Display Fabricated by Mask‐less Digital Lithography Technology
Author:
Affiliation:
1. Electronic and Optoelectronic System Research Laboratories (EOSL)Industrial Technology Research Institute (ITRI) Taiwan, 31040, R.O.C.
Funder
Industrial Technology Research Institute
Publisher
Wiley
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/sdtp.13335
Reference7 articles.
1. Flexible, fast, and low-cost production process for polymer based diffractive optics
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3. MEMS-based lithography for the fabrication of micro-optical components
4. High-resolution maskless lithography
5. A high-end mask writer using a spatial light modulator
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