Automated AC Voltammetric Sensor for Early Fault Detection and Diagnosis in Monitoring of Electroplating Processes
Author:
Publisher
Wiley
Subject
Electrochemistry,Analytical Chemistry
Reference21 articles.
1. Damascene copper electroplating for chip interconnections
2. Advanced MEMS Packaging 2009
3. The chemistry of the additives in an acid copper electroplating bath
4. Chemometrics for the analysis of voltammetric data
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1. Towards Industry 4.0;Journal of The Surface Finishing Society of Japan;2021-09-01
2. Review—Management of Copper Damascene Plating;Journal of The Electrochemical Society;2018-11-03
3. Condition monitoring and prediction of solution quality during a copper electroplating process;Journal of Intelligent Manufacturing;2018-09-27
4. Online Monitoring of Copper Damascene Electroplating Bath by Voltammetry: Selection of Variables for Multiblock and Hierarchical Chemometric Analysis of Voltammetric Data;International Journal of Electrochemistry;2017
5. Temperature Compensation by Calibration Transfer for an AC Voltammetric Analyzer of Electroplating Baths;Electroanalysis;2016-10-12
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