Colored timed Petri nets for modeling and analysis of cluser tools-Reference-Cited by-同舟云学术

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Colored timed Petri nets for modeling and analysis of cluser tools

Published:2010-04-07 Issue:3 Volume:12 Page:253-266
ISSN:1561-8625
Container-title:Asian Journal of Control
language:en
Short-container-title:Asian Journal of Control

Author:

Wu NaiQi,Zhou MengChu

Publisher

Wiley

Subject

Control and Systems Engineering

Reference33 articles.

1. Integrated processing equipment;Bader;Solid State Technol.,1990

2. Coping with the high of wafer fabs;Burggraaf;Semicond. Int.,1995

3. The driving forces in cluster tools development;Singer;Semicond. Int.,1995

4. Detection of ada static deadlocks using Petri net invariants;Murata;IEEE Trans. Softw. Eng.,1989

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