Modeling of Capacitively Coupled RF Plasmas in H2
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.200800219/fullpdf
Reference32 articles.
1. Particle-in-cell/Monte Carlo simulation of radio frequency SiH/sub 4//H/sub 2/ discharges
2. Negative ion sources for high energy accelerators (invited)
3. Nonequilibrium dissociation of hydrogen in a parallel-plate radio frequency discharge
4. Two-dimensional electrical modeling of asymmetric radio-frequency discharges for geometry effect analysis. Comparison with experiments
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