Mechanisms Involved in the Conversion of ppHMDSO Films into SiO2-Like by Oxygen Plasma Treatment
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Reference18 articles.
1. Plasma enhanced chemical vapor deposited SiCOH dielectrics: from low-kto extreme low-kinterconnect materials
2. Effect of oxygen plasma exposure of porous spin-on-glass films
3. Crosslinked polydimethylsiloxane exposed to oxygen plasma studied by neutron reflectometry and other surface specific techniques
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5. Tailoring of the morphology and chemical composition of thin organosilane microwave plasma polymer layers on metal substrates
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