Atmospheric Pressure PE-CVD of Fluorocarbon Thin Films by Means of Glow Dielectric Barrier Discharges
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Reference54 articles.
1. , , , “Plasma Deposition, Treatment and Etching of Polymers”, Ed., Academic Press, New York 1990, p. 95.
2. “Plasma Processing of Polymers”, , , Eds., NATO ASI Ser., Ser. E Appl. Sci. 346, Kluwer Acad. Publ., Dordrecht 1997.
3. Spectroscopic diagnostics of CF4‐O2 plasmas during Si and SiO2 etching processes
4. Mechanisms of deposition and etching of thin films of plasma‐polymerized fluorinated monomers in radio frequency discharges fed with C2F6‐H2and C2F6‐O2mixtures
5. Diagnostics and decomposition mechanism in radio-frequency discharges of fluorocarbons utilized for plasma etching or polymerization
Cited by 34 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Numerical investigation of the directional control of electron density and gas temperature in atmospheric pressure dielectric barrier discharge by using low- and high-frequency coupling modulation;Physics of Plasmas;2021-08
2. Atmospheric pressure plasma treatment of polyurethane foams with He–O2 fed dielectric barrier discharges;Surfaces and Interfaces;2020-09
3. Numerical study of the discharge properties of atmospheric dielectric barrier discharge by using 200 kHz/13.56 MHz excitations;AIP Advances;2018-07
4. Hydrophobic and superhydrophobic surfaces fabricated using atmospheric pressure cold plasma technology: A review;Advances in Colloid and Interface Science;2018-04
5. Atmospheric-pressure diffuse dielectric barrier discharges in Ar/O2gas mixture using 200 kHz/13.56 MHz dual frequency excitation;Journal of Physics D: Applied Physics;2018-02-21
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3