In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities

Author:

Chambonneau Maxime1ORCID,Grojo David2ORCID,Tokel Onur34ORCID,Ilday Fatih Ömer345ORCID,Tzortzakis Stelios678ORCID,Nolte Stefan19ORCID

Affiliation:

1. Institute of Applied Physics, Abbe Center of Photonics Friedrich Schiller University Jena Albert‐Einstein‐Straße 15 Jena 07745 Germany

2. Aix‐Marseille University CNRS LP3 Marseille F‐13288 France

3. UNAM – National Nanotechnology Research Center and Institute of Materials Science and Nanotechnology Bilkent University Ankara 06800 Turkey

4. Department of Physics Bilkent University Ankara 06800 Turkey

5. Department of Electrical and Electronics Engineering Bilkent University Ankara 06800 Turkey

6. Science Program Texas A&M University at Qatar Doha 23874 Qatar

7. Institute of Electronic Structure and Laser (IESL) Foundation for Research and Technology—Hellas (FORTH) Heraklion 1527 GR‐71110 Greece

8. Materials Science and Technology Department University of Crete Heraklion 71003 Greece

9. Fraunhofer Institute for Applied Optics and Precision Engineering (IOF) Center of Excellence in Photonics Albert‐Einstein‐Straße 7 Jena 07745 Germany

Funder

Bundesministerium für Bildung und Forschung

H2020 European Research Council

Publisher

Wiley

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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