High-Speed and Wide-Angle Deflection Optical MEMS Scanner Using Piezoelectric Actuation
Author:
Publisher
Wiley
Subject
Electrical and Electronic Engineering
Reference23 articles.
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5. Garnier A, Bourouina T, Fujita H, Orsier E, Masuzawa T, Hiramoto T, Peuzin J-C. A fast, robust and simple 2-D micro-optical scanner based on contactless magnetostrictive actuation. Proceedings of MEMS 2000, Miyazaki, Japan, 2000; 715-720.
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