Carbon concentration measurement in silicon down to 1014
cm-3
: second generation IR, SIMS, CPAA and standardization
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Published:2016-08-09
Issue:10-12
Volume:13
Page:842-847
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ISSN:1862-6351
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Container-title:physica status solidi (c)
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language:en
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Short-container-title:Phys. Status Solidi C
Subject
Condensed Matter Physics
Cited by
3 articles.
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