Quantification of AES depth profiling data of polycrystalline Al films with Gaussian and non-Gaussian surface height distributions-Reference-Cited by-同舟云学术

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Quantification of AES depth profiling data of polycrystalline Al films with Gaussian and non-Gaussian surface height distributions

Published:2013-02-12 Issue:7 Volume:45 Page:1148-1151
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Jian W.¹,Liu Y.¹,Wang X. Y.¹,Rao S. P.¹,Hofmann S.²,Wang J. Y.¹

Affiliation:

1. Department of Physics; Shantou University; 243 Daxue Road; Shantou; 515063; Guangdong; China

2. Max Planck Institute for Intelligent Systems (formerly MPI for Metals Research); Heisenbergstrasse 3; D-70569; Stuttgart; Germany

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference18 articles.

1. Determination of the interdiffusion coefficient for Si/Al multilayers by Auger electron spectroscopical sputter depth profiling

2. Atomic mixing, surface roughness and information depth in high-resolution AES depth profiling of a GaAs/AlAs superlattice structure

3. Auger electron spectroscopy depth profiling of Ni/Cr multilayers by sputtering with N2+ ions

4. Sputter depth profile analysis of interfaces

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Evaluation of AES depth profiles with serious artefacts in C/W multilayers;Applied Surface Science;2022-04

2. Artifacts in multilayer depth profiling: Origin and quantification of a double peak layer profile of Ag in ToF-SIMS depth profiles of an Ag/Ni multilayer;Materials Characterization;2021-01

3. Quantitative evaluation of sputtering induced surface roughness and its influence on AES depth profiles of polycrystalline Ni/Cu multilayer thin films;Applied Surface Science;2017-07

4. Measurement of the roughness of nano-scale surfaces, both unannealed and with limited anneal, by atomic force microscopy;Measurement Science and Technology;2014-08-29

5. Influence of non-Gaussian roughness on sputter depth profiles;Applied Surface Science;2013-07

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