Silicon Fishbone-Shaped MEMS Resonator with Digitally Variable Resonant-Frequency Tuning

Author:

Tanigawa Hiroshi,Makita Sho,Suzuki Kenichiro

Publisher

Wiley

Subject

Electrical and Electronic Engineering

Reference12 articles.

1. MEMS technology for timing and frequency control;Nguyen;IEEE Transactions on Ultrasonic, Ferroelectrics, and Frequency Control,2007

2. VHF free-free beam high-Q micromechanical resonators;Wang;Journal of Microeletromechanical Systems,2000

3. High-Q UHF micromechanical radial-contour mode disk resonators;Clark;Journal of Microeletromechanical Systems,2005

4. Kaajakari V, Mattila T, Oja A, Kiihamaki J, Kattelus H, Koskenvuori M, Rantakari P, Tittonen I, Seppa H. Square-extension mode single-crystal silicon micromechanical RF-resonator. Digest of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, 2003; 951-954.

5. Makita S, Tanigawa H, Suzuki K. Silicon fishbone-shaped resonant-frequency-tunable MEMS resonator. Digest of 2007 International Microprocesses and Nanotechnology Conference, The Japan Society of Applied Physics: Kyoto, 2007; 500-501.

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