Interface Stress for Bidirectional Frequency Tuning of Prebuckled Vanadium Dioxide MEMS Resonators-Reference-Cited by-同舟云学术

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Interface Stress for Bidirectional Frequency Tuning of Prebuckled Vanadium Dioxide MEMS Resonators

Published:2019-09-09 Issue:21 Volume:6 Page:1900887
ISSN:2196-7350
Container-title:Advanced Materials Interfaces
language:en
Short-container-title:Adv. Mater. Interfaces

Author:

Cao Yunqi¹,Sepúlveda Nelson¹^ORCID

Affiliation:

1. Department of Electrical and Computer Engineering Michigan State University East Lansing MI 48824 USA

Funder

National Science Foundation

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/admi.201900887

Reference47 articles.

1. Design, simulation and fabrication of a MEMS accelerometer by using sequential and pulsed-mode DRIE processes

2. An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer

3. A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate

4. Room temperature, very sensitive thermometer using a doubly clamped microelectromechanical beam resonator for bolometer applications

5. Thermal simulation of micromachined bridge and self-heating for uncooled VO2 infrared microbolometer

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation;Journal of Microelectromechanical Systems;2024-02

2. A Novel Vanadium Dioxide-Based Dual-Heater Microfluidic Thermal Flow Sensor with Record High Sensitivity;IEEE Sensors Journal;2023

3. Microfluidic thermal flow sensor based on phase-change material with ultra-high thermal sensitivity;Journal of Materials Chemistry C;2023

4. A thermally activated VO2-based attenuator with SRR structure;Materials & Design;2022-11

5. Vanadium Dioxide-Based High Sensitivity Dual-Heater Calorimetric Microfluidic Sensor;2022 IEEE Sensors;2022-10-30

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