Controllable Fabrication and Rectification of Bipolar Nanofluid Diodes in Funnel‐Shaped Si3N4 Nanopores

Author:

Lei Xin12ORCID,Zhang Jiayan1,Hong Hao23,Wei Jiangtao2,Liu Zewen2ORCID,Jiang Lei45ORCID

Affiliation:

1. School of Chemistry Beihang University Beijing 100191 P. R. China

2. School of Integrated Circuits Tsinghua University Beijing 100084 P. R. China

3. Department of Microelectronics Delft University of Technology Delft 2628 CD The Netherlands

4. Key Laboratory of Bio‐Inspired Materials and Interfacial Science Technical Institute of Physics and Chemistry Chinese Academy of Sciences Beijing 100190 P. R. China

5. School of Future Technology University of Chinese Academy of Sciences Beijing 101407 P. R. China

Abstract

AbstractSolid‐state nanopores attract widespread interest, owning to outstanding robustness, extensive material availability, as well as capability for flexible manufacturing. Bioinspired solid‐state nanopores further emerge as potential nanofluidic diodes for mimicking the rectification progress of unidirectional ionic transport in biological K+ channels. However, challenges that remain in rectification are over‐reliance on complicated surface modifications and limited control accuracy in size and morphology. In this study, suspended Si3N4 films of only 100 nm thickness are used as substrate and funnel‐shaped nanopores are controllably etched on that with single‐nanometer precision, by focused ion beam (FIB) equipped with a flexibly programmable ion dose at any position. A small diameter 7 nm nanopore can be accurately and efficiently fabricated in only 20 ms and verified by a self‐designed mathematical model. Without additional modification, funnel‐shaped Si3N4 nanopores functioned as bipolar nanofluidic diodes achieve high rectification by simply filling each side with acidic and basic solution, respectively. Main factors are finely tuned experimentally and simulatively to enhance the controllability. Moreover, nanopore arrays are efficiently prepared to further improve rectification performance, which has great potential for high‐throughput practical applications such as extended release of drugs, nanofluidic logic systems, and sensing for environmental monitoring and clinical diagnosis.

Publisher

Wiley

Subject

Biomaterials,Biotechnology,General Materials Science,General Chemistry

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