Author:
Levinson William A.,Arnold Anthony,Dehodgins Ofelia
Subject
Materials Chemistry,Polymers and Plastics,General Chemistry,Materials Chemistry,Polymers and Plastics,General Chemistry
Reference17 articles.
1. Semiconductor International, p. 130, May 1989.
2. and Properties of Liquids and Solutions, p. 73, John Wiley & Sons (1982).
3. and The Properties of Gases and Liquids, 3rd ed., p. 437, McGraw-Hill, (1977).
4. A mathematical model for spin coating of polymer resists
5. Characteristics of resist films produced by spinning
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