1. State Key Laboratory of Fabrication Technologies for Integrated Circuits Institute of Microelectronics of Chinese Academy of Sciences Beijing 100029 China
2. School of Integrated Circuits University of Chinese Academy of Sciences Beijing 100049 China
3. Key Laboratory of Polar Materials and Devices East China Normal University Shanghai 200062 China
4. Frontier Institute of Chip and System Fudan University Shanghai 200062 China
5. The State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology School of Microelectronics Xidian University Xi'an 710071 China
6. School of Integrated Circuits Tsinghua University Beijing 100084 China