1. Institute of Microstructure TechnologyKarlsruhe Institute of Technology Hermann‐von‐Helmholtz‐Platz 1 76344 Eggenstein‐Leopoldshafen Germany
2. Light Technology InstituteKarlsruhe Institute of Technology Engesserstr. 13 76131 Karlsruhe Germany
3. Institute of Thermal Process Engineering–Thin Film Technology (TFT)Karlsruhe Institute of Technology Kaiserstr. 12 76131 Karlsruhe Germany