1. Laboratory for MEMS Applications; IMTEK Department of Microsystems Engineering; University of Freiburg; Georges-Koehler-Allee 103 79110 Freiburg Germany
2. HSG-IMIT Institut für Mikro- und Informationstechnik; der Hahn-Schickard-Gesellschaft e.V.; Georges-Koehler-Allee 103 79110 Freiburg Germany
3. Department of Chemical Engineering; Brigham Young University; 350 CB Provo UT 84602 USA
4. Helmholtz Zentrum Berlin; Hahn-Meitner-Platz 1 14109 Berlin Germany
5. FIT University of Freiburg; Stefan-Meier-Straße 21 79104 Freiburg Germany