Preparation of siloxane-silsesquioxane hybrid thin films for large-scale-integration interlayer dielectrics with excellent mechanical properties and low dielectric constants-Reference-Cited by-同舟云学术

Preparation of siloxane-silsesquioxane hybrid thin films for large-scale-integration interlayer dielectrics with excellent mechanical properties and low dielectric constants

Published:2003-08-18 Issue:3 Volume:90 Page:626-634
ISSN:0021-8995
Container-title:Journal of Applied Polymer Science
language:en
Short-container-title:J. Appl. Polym. Sci.

Author:

Yim Jin-Heong,Lyu Yi-Yeol,Jeong Hyun-Dam,Mah Sang Kook,Hyeon-Lee Jingyu,Hahn Jun-Hee,Kim Gwang Seok,Chang Seok,Park Jae-Geun

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,Surfaces, Coatings and Films,General Chemistry

Reference17 articles.

1. Organic and Inorganic Spin-On Polymers for Low-Dielectric-Constant Applications

2. Preparation and properties of polysilsesquioxanes: Polysilsesquioxanes and flexible thin films by acid-catalyzed controlled hydrolytic polycondensation of methyl- and vinyltrimethoxysilane

3. Preparation and properties of flexible thin films by acid-catalyzed hydrolytic polycondensation of methyltrimethoxysilane

4. Mechanical Properties of Low Dielectric-Constant Organic-Inorganic Hybrids

5. Bridged Polysilses-quioxanes: Molecular Engineering of Hybrid Organic–Inorganic Materials

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