Hydrogenated Amorphous Silicon by Infrared Multiphoton Absorption with a Pulsed CO2-Laser
Author:
Publisher
Wiley
Subject
General Chemical Engineering
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/bbpc.19900941010/fullpdf
Reference56 articles.
1. Lifetime of dominant radicals for the deposition of a-Si:H from SiH4 and Si2H6 glow discharges
2. Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ab Initio Chemical Kinetics for the Thermal Decomposition of SiH4 + Ion and Related Reverse Ion–Molecule Reactions of Interest to PECVD of a-Si:H Films;Plasma Chemistry and Plasma Processing;2017-06-03
2. Ab Initio Chemical Kinetics for SiH2 + Si2H6 and SiH3 + Si2H5 Reactions and the Related Unimolecular Decomposition of Si3H8 under a-Si/H CVD Conditions;The Journal of Physical Chemistry A;2013-10-09
3. Chemical gas-phase reactions for a-Si:H and μc-Si:H deposition;Thin Solid Films;1997-01
4. Laserchemische Abscheidung von Festkörpern aus der Gasphase;Laser in Technik und Forschung;1993
5. Role of silylene in the deposition of hydrogenated amorphous silicon;The Journal of Physical Chemistry;1991-11
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3