Silicon Film Formation by Reaction of Active Hydrogen with Silane
Author:
Publisher
Wiley
Subject
General Chemical Engineering
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/bbpc.19910951023/fullpdf
Reference19 articles.
1. Hydrogenated Amorphous Silicon Thin-Film Deposition by Direct Photo-Enhanced Decomposition of Silane Using an Internal Hydrogen Discharge Lamp.
2. ArF laser CVD of hydrogenated amorphous silicon: The role of buffer gases
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