Laser crystallization of hydrogenated amorphous silicon
Author:
Affiliation:
1. Hahn‐Meitner‐Institut Berlin, Kekuléstr. 5, 12489 Berlin, Germany
2. Jurusan Fisika Fakultas MIP A, Universitas Indonesia, Depok 16424, Indonesia
Publisher
Wiley
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssc.200304311
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5. Laser dehydrogenation/crystallization of plasma‐enhanced chemical vapor deposited amorphous silicon for hybrid thin film transistors
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