Effect of carbon on oxygen precipitation in Czochralski silicon
Author:
Affiliation:
1. Solid State Section, Physics Department, University of Athens, Panepistimiopolis, Zografos, 157 84 Athens, Greece
2. Ioffe Physico‐Technical Institute of the Russian Academy of Sciences, Politekhnicheskaya ul. 26, 194021 St. Petersburg, Russia
Publisher
Wiley
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssc.200460537
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