Novel noncontact thickness metrology for backend manufacturing of wide bandgap light emitting devices-Reference-Cited by-同舟云学术

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Novel noncontact thickness metrology for backend manufacturing of wide bandgap light emitting devices

Published:2005-02 Issue:3 Volume:2 Page:984-989
ISSN:1610-1634
Container-title:physica status solidi (c)
language:en
Short-container-title:phys. stat. sol. (c)

Author:

Walecki Wojtek J.¹,Lai Kevin¹,Souchkov Vitalij¹,Van Phuc¹,Lau SH¹,Koo Ann¹

Affiliation:

1. Frontier Semiconductor, 1631 No. 1^st St. San Jose CA 95112, USA

Publisher

Wiley

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssc.200460606

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