Synchronized real-space and frequency-domain low-coherence interferometry for wafer thickness and metrology applications-Reference-Cited by-同舟云学术

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Synchronized real-space and frequency-domain low-coherence interferometry for wafer thickness and metrology applications

Published:2018-08-18 Issue: Volume: Page:
ISSN:
Container-title:Interferometry XIX
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Author:

Walecki Wojtek J.,Hung Wei-Chun,Morency Raphael

Publisher

SPIE

Reference18 articles.

1. Optical Coherence Tomography

2. Non-contact fast wafer metrology for ultra-thin patterned wafers mounted on grinding and dicing tapes

3. Novel Non-contact Wafer Mapping Metrologies for Thin and Ultrathin Chip Manufacturing Applications;Walecki,2002

4. Novel Noncontact Thickness Metrology for Partially Transparent and Nontransparent Wafers for Backend Semiconductor Manufacturing;Walecki,2004

5. Novel noncontact thickness metrology for backend manufacturing of wide bandgap light emitting devices;Walecki,2005

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