A pulsed EDMR study of hydrogenated microcrystalline silicon at low temperatures
Author:
Affiliation:
1. Hahn‐Meitner‐Institut Berlin, Kekuléstr. 5, 12489 Berlin, Germany
Publisher
Wiley
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssc.200304326
Reference26 articles.
1. Microstructure and surface roughness of microcrystalline silicon prepared by very high frequency-glow discharge using hydrogen dilution
2. Structure and growth of hydrogenated microcrystalline silicon: Investigation by transmission electron microscopy and Raman spectroscopy of films grown at different plasma excitation frequencies
3. ChristophBöhme Ph. D. thesis Philipps Universität Marburg/Lahn 2003.
4. Defect and Tail States in Microcrystalline Silicon investigated by pulsed ESR
5. Defects and recombination in microcrystalline silicon
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