Predicted depth profiles for nitrogen-ion implantation into gallium arsenide
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Published:2008-04
Issue:4
Volume:5
Page:939-942
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ISSN:1610-1634
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Container-title:physica status solidi (c)
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language:en
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Short-container-title:phys. stat. sol. (c)
Author:
Risch M.,Bradley M.
Subject
Condensed Matter Physics