Study on the correlation between dielectric constant and chemical shift in FTIR spectra of SiOC film by chemical vapor deposition after annealing
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Published:2010-02
Issue:2
Volume:7
Page:448-451
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ISSN:1862-6351
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Container-title:physica status solidi (c)
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language:en
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Short-container-title:Phys. Status Solidi (c)
Subject
Condensed Matter Physics
Cited by
8 articles.
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