Thermodynamic and Kinetic Tuning of Block Copolymer Based on Random Copolymerization for High-Quality Sub-6 nm Pattern Formation

Author:

Hur Yoon Hyung1,Song Seung Won1,Kim Jong Min1,Park Woon Ik2,Kim Kwang Ho2,Kim YongJoo3,Jung Yeon Sik1ORCID

Affiliation:

1. Department of Materials Science and Engineering; Korea Advanced Institute of Science and Technology (KAIST); 291 Daehak-ro, Yuseong-gu Daejeon 302-701 Republic of Korea

2. Global Frontier R&D Center for Hybrid Interface Materials (HIM); Pusandaehak-ro 63 beon-gil, Geumjeong-gu Busan 46241 Republic of Korea

3. KI for NanoCentury; Korea Advanced Institute of Science and Technology (KAIST); 291 Daehak-ro, Yuseong-gu Daejeon 302-701 Republic of Korea

Funder

Global Frontier Hybrid Interface Materials

National Research Foundation of Korea

Ministry of Science ICT and Future Planning

Ministry of Trade, Industry and Energy

KSRC

Publisher

Wiley

Subject

Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials

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