Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf ‐Sputtering for Wrist‐Worn Piezoelectric Energy Harvesters-Reference-Cited by-同舟云学术

Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf ‐Sputtering for Wrist‐Worn Piezoelectric Energy Harvesters

Published:2018-07-20 Issue:36 Volume:28 Page:1801327
ISSN:1616-301X
Container-title:Advanced Functional Materials
language:en
Short-container-title:Adv. Funct. Mater.

Author:

Yeo Hong Goo¹,Xue Tiancheng²,Roundy Shad²,Ma Xiaokun³,Rahn Christopher³,Trolier‐McKinstry Susan⁴^ORCID

Affiliation:

1. Department of Materials Science and Engineering and Materials Research Institute University Park PA 16802 USA

2. Department of Mechanical Engineering University of Utah 1495 E 100 S Salt Lake City UT USA

3. Department of Mechanical and Nuclear Engineering The Pennsylvania State University University Park PA 16802 USA

4. Materials Science and Engineering Department and Materials Research Institute The Pennsylvania State University University Park PA 16802 USA

Funder

National Science Foundation

Publisher

Wiley

Subject

Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adfm.201801327

Reference40 articles.

1. Piezoelectric MEMS for energy harvesting

2. Efficient Energy Harvesting Using Piezoelectric Compliant Mechanisms: Theory and Experiment

3. For films given the mixed boundary conditions (the in‐plane strain is known the out‐of‐plane stress is zero) the materials figure of merit is approximated as: FoM = (e31 f)2/εr;e31 f: film transverse piezoelectric coefficient; andεr: dielectric constant.

4. {1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

5. Characterization of Nb-doped Pb(Zr,Ti)O3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications

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