1. Ningbo Institute of Materials Technology and Engineering (NIMTE); Chinese Academy of Sciences; Ningbo 315201 Zhejiang China
2. Zhejiang Key Laboratory for Advanced Microelectronic Intelligent Systems and Applications; Hangzhou 310007 Zhejiang China
3. Advanced Semiconductor Laboratory; King Abdullah University of Science and Technology (KAUST); Thuwal 23955-6900 Saudi Arabia
4. Structural Molecular Imaging Light Enhanced Spectroscopies Lab; King Abdullah University of Science and Technology (KAUST); Thuwal 23955-6900 Saudi Arabia
5. University of Chinese Academy of Sciences; No.19(A) Yuquan Road Shijingshan District Beijing 100049 P. R. China
6. Advanced Micro-Fabrication Equipment Inc.; Shanghai 201201 China