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ToF-SIMS study of phosphorus diffusion in low-dimensional silicon structures

  • Published:2012-05-18 Issue:1 Volume:45 Page:386-389
  • ISSN:0142-2421
  • Container-title:Surface and Interface Analysis
  • language:en
  • Short-container-title:Surf. Interface Anal.

Author:

Perego Michele1,Seguini Gabriele1,Fanciulli Marco12

Affiliation:

1. Laboratorio MDM; IMM-CNR; Via Olivetti 2 20864 Agrate Brianza MB Italy

2. Dipartimento di Scienza dei Materiali; Università degli Studi Milano - Bicocca; Via R. Cozzi 53 20125 Milano

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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3. Ab initio studies of the optoelectronic structure of undoped and doped silicon nanocrystals and nanowires: the role of size, passivation, symmetry and phase;Faraday Discussions;2020

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