New Dimethyl(norbornadienyl)platinum(II) Precursors for Platinum MOCVD-Reference-Cited by-同舟云学术

New Dimethyl(norbornadienyl)platinum(II) Precursors for Platinum MOCVD

Published:2014-03 Issue:1-2-3 Volume:20 Page:59-68
ISSN:0948-1907
Container-title:Chemical Vapor Deposition
language:en
Short-container-title:Chem. Vap. Deposition

Author:

Maudez William¹,Roy Christelle¹,Tran Phong Dinh¹,Thurier Cyril¹,Karmous Farah¹,Doppelt Pascal¹

Affiliation:

1. ▪ Please check titles of all authors ▪LSPM; Université Paris 13; UPR CNRS 3407; Institut Galilée; 99 avenue Jean-Baptiste Clément 93430 Villetaneuse (France)

Publisher

Wiley

Subject

Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry

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