Investigation of Optical, Electrical, and Mechanical Properties of MOCVD-grown ZrO2Films-Reference-Cited by-同舟云学术

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Investigation of Optical, Electrical, and Mechanical Properties of MOCVD-grown ZrO2Films

Published:2014-09 Issue:7-8-9 Volume:20 Page:320-327
ISSN:0948-1907
Container-title:Chemical Vapor Deposition
language:en
Short-container-title:Chem. Vap. Deposition

Author:

Dang Van-Son¹,Banerjee Manish¹,Zhu Huaizhi¹,Srinivasan Nagendra Babu¹,Parala Harish¹,Pfetzing-Micklich Janine²,Wieck Andreas D.³⁴,Devi Anjana¹⁴

Affiliation:

1. Inorganic Chemistry II, Faculty of Chemistry and Biochemistry; Ruhr-University; Bochum 44801 Bochum (Germany)

2. Institute for Materials; Ruhr-University; Bochum 44801 Bochum (Germany)

3. Applied Solid State Physics; Ruhr-University; Bochum 44801 Bochum (Germany)

4. Materials Research Department; Ruhr-University; Bochum 44801 Bochum (Germany)

Publisher

Wiley

Subject

Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry

Reference36 articles.

1. Structural and optical properties of thin zirconium oxide films prepared by reactive direct current magnetron sputtering

2. Characteristics of ZrO2 gate dielectric deposited using Zrt–butoxide and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method

3. Experimental and theoretical determination of the electronic structure and optical properties of three phases ofZrO2

4. Phonons and lattice dielectric properties of zirconia

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1. An overview of conventional and new advancements in high kappa thin film deposition techniques in metal oxide semiconductor devices;Journal of Materials Science: Materials in Electronics;2022-03-08

2. Structure and optical properties of ZrxHf1-xO2 films deposited by pulsed laser co-ablation of Zr and Hf targets with the assistance of oxygen plasma;Ceramics International;2022-01

3. Transparent heat regulating (THR) materials and coatings for energy saving window applications: Impact of materials design, micro-structural, and interface quality on the THR performance;Progress in Materials Science;2018-06

4. Nanodots and microwires of ZrO 2 grown on LaAlO 3 by photo-assisted metal–organic chemical vapor deposition;Chinese Physics B;2016-02

5. Homoleptic zirconium amidates: single source precursors for the aerosol-assisted chemical vapour deposition of ZrO2;Journal of Materials Chemistry C;2016

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