Self-Align Fabrication of Narrow-Gapped Dual AFM Tip Using Si Trench Refilling with SOG and Magnetostrictive Film Stacked Dual Cantilever Formation-Reference-Cited by-同舟云学术

Self-Align Fabrication of Narrow-Gapped Dual AFM Tip Using Si Trench Refilling with SOG and Magnetostrictive Film Stacked Dual Cantilever Formation

Author:

KAWASHIMA KENTA¹,MINETA TAKASHI¹,MAKINO EIJI²,KAWASHIMA TAKAHIRO³,SHIBATA TAKAYUKI³

Affiliation:

1. Yamagata University; Japan

2. Hirosaki University; Japan

3. Toyohashi University of Technology; Japan

Publisher

Wiley

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy,Signal Processing

Reference15 articles.

1. Electrostatic stretching of hyaluronic acid molecule and cutting with AFM probe;Kanezawa;Tech Digest Transducers,2007

3. Fabrication and characterization of narrow-gapped silicon dual nano probe for atomic force microscope;Umino;JSME Annual Meeting,2009

4. Fabrication of dual cantilever with FePd magnetostrictive film and narrow gapped dual needle;Kawashima;JSME Annual Meeting J161021-01-02,2012

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