Abstract
The microfabrication with a magnetostrictive TbxDy(1−x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1−x)Fey is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb0.36Dy0.64Fe1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Reference40 articles.
1. Handbook of Giant Magnetostrictive Materials;Engdahl,2000
2. Handbook of Ferromagnetic Material;Clark,1980
3. Handbook of Ferromagnetic Material;Buschow,1990
4. The True Cause of Magnetostriction;Mnyukh;Am. J. Condens. Matter Phys.,2014
5. Combinatorial Electrodeposition of Magnetostrictive Fe[sub 1−x]Ga[sub x]
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献