Author:
Fujimoto Toshiyuki,Mizota Takeshi,Nonaka Hidehiko,Kurokawa Akira,Ichimura Shingo
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference3 articles.
1. International Technology Roadmap for Semiconductors 2001. Semiconductor Industry Association: 2001.
2. Cluster ion beam process technology
3. Proc. 14th Int. Conf. on Secondary Ion Mass Spectrometry (SIMS XIV), San Diego, 2003.
Cited by
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