Charakterisierung ultrareiner Materialien für die Mikroelektronik mit aktivierungsanalytischen Methoden
Author:
Publisher
Wiley
Subject
General Medicine
Reference11 articles.
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1. Ultratrace characterization of AlSiCu sputter targets for Th, U and 35 other elements by neutron activation analysis;Journal of Radioanalytical and Nuclear Chemistry Articles;1996-07
2. Solution and slurry sampling electrothermal atomic absorption spectrometry for the analysis of high purity quartz;Spectrochimica Acta Part B: Atomic Spectroscopy;1996-07
3. Radiochemical neutron activation analysis of ultra-pure molybdenum-based microelectronic materials for detrimental impurities;Fresenius' Journal of Analytical Chemistry;1995
4. On-line coupling of atomic spectrometry and ion chromatography with time resolved registration as a new tool for ultra trace analysis in refractory metals;Fresenius' Journal of Analytical Chemistry;1993
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