Antiadhesion Surface Treatments of Molds for High-Resolution Unconventional Lithography
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference29 articles.
1. Soft Lithography
2. Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography
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4. Imprint Lithography with 25-Nanometer Resolution
5. Sub-10 nm imprint lithography and applications
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