High-Modulus Spin-On Organosilicate Glasses for Nanoporous Applications-Reference-Cited by-同舟云学术

High-Modulus Spin-On Organosilicate Glasses for Nanoporous Applications

Published:2007-03-05 Issue:5 Volume:19 Page:705-710
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Adv. Mater.

Author:

Ro H. W.,Char K.,Jeon E.-c.,Kim H.-J.,Kwon D.,Lee H.-J.,Lee J.-K.,Rhee H.-W.,Soles C. L.,Yoon D. Y.

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference30 articles.

1. The International Technology Roadmap for Semiconductors: 2005, Semiconductor Industry Association, http://www.itrs.net/Links/2005ITRS/Home2005.htm (accessed January 2007).

2. Low-Dielectric, Nanoporous Organosilicate Films Prepared via Inorganic/Organic Polymer Hybrid Templates

3. Periodic Mesoporous Organosilicas Containing Interconnected [Si(CH 2 )] 3 Rings

4. Mesoporous Silicates Prepared Using Preorganized Templates in Supercritical Fluids

5. Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers

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