Low-Cost Fabrication of Transparent Hard Replica Molds for Imprinting Lithography
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/adma.200803243/fullpdf
Reference26 articles.
1. Optical lithography: Introduction
2. Resolution limits of optical lithography
3. An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography
4. Extreme ultraviolet lithography: A review
5. Imprint Lithography with 25-Nanometer Resolution
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