Solid‐state curved focal plane arrays realized with simple approaches for compact and high‐performance optical systems

Abstract

AbstractWe present an overview of our work on design, development, and demonstration of simple and effective approaches to fabricating solid‐state curved focal plane arrays (CFPAs) that have spawned a novel class of detector arrays. CFPAs can dramatically alter the capability and size of image systems, with an especially high impact in scientific and space applications in terms of science‐instrument size, mass, simplicity, optical performance, and cost. The key to the simplicity of our approaches to curved focal plane arrays, implemented in thick, high‐purity silicon or thinned membrane low‐resistivity substrate detectors is that the curvature of the surface is independent of the VLSI fabrication process of imaging arrays. We present the principles of two approaches, results of fabrication of curved arrays, and results of analysis for limits of curving silicon arrays. New concepts and techniques were also developed as spin offs of this program for extreme curvature FPAs and infrared CPFAs.