P‐109: Investigation of Low Residual Stress Anti Reflection Coating with High Hardness for Display Applications

Author:

Kim Sungwoo1,Joo Jongseok1

Affiliation:

1. Process Architecture Team, OLED Business Samsung Display Giheung-Si Kyungki-Do South Korea

Abstract

Anti reflection coating with high hardness on the OLED display surface was studied to improve the wear resistance and visibility of OLED. However, the high residual stress inside the multilayer thin film configuration of anti reflection coating has been a problem and the improvement is necessary. In this study, the residual stress and optical properties variation on various deposition conditions on the thin film were investigated. In addition, we suggested new coating structure using nanocomposites to overcome the residual stress of films.

Publisher

Wiley

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