CVD of Metals Using Alcohols and Metal Acetylacetonates, Part II: Role of Solvent and Characterization of Metal Films Made by Pulsed Spray Evaporation CVD-Reference-Cited by-同舟云学术

CVD of Metals Using Alcohols and Metal Acetylacetonates, Part II: Role of Solvent and Characterization of Metal Films Made by Pulsed Spray Evaporation CVD

Published:2007-05 Issue:5 Volume:13 Page:227-231
ISSN:0948-1907
Container-title:Chemical Vapor Deposition
language:en
Short-container-title:Chem. Vap. Deposition

Author:

Premkumar P.A.,Bahlawane N.,Reiss G.,Kohse-Höinghaus K.

Publisher

Wiley

Subject

Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry

Reference29 articles.

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4. Volatile CVD precursor for Ni film: cyclopentadienylallylnickel

5. T.-T. Kodas, M. Hampden Smith, in The Chemistry of Metal CVD (Eds: T.-T. Kodas, M. Hampden-Smith), VCH, Weinheim, Germany 1994.

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