Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
Author:
Publisher
Wiley
Subject
Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry
Reference54 articles.
1. Silver metallization for advanced interconnects
2. Scaling properties and electromigration resistance of sputtered Ag metallization lines
3. Thermal stability of titanium nitride diffusion barrier films for advanced silver interconnects
4. Metalorganic chemical vapor deposition of silver thin films for future interconnects by direct liquid injection system
5. Silver metal organic chemical vapor deposition for advanced silver metallization
Cited by 66 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. 亚10纳米超薄金属膜:制备、光学性质及应用;Chinese Journal of Lasers;2023
2. Functionalization of Collagen Fiber with Nano-Islands of Silver Via Atomic Layer Deposition Promotes Bone Healing;2023
3. The Array of Si Nanowires Covered with Ag Nanoparticles by ALD: Fabrication Process and Optical Properties;Coatings;2022-11-15
4. Silver Thin‐Film Electrodes Grown by Low‐Temperature Plasma‐Enhanced Spatial Atomic Layer Deposition at Atmospheric Pressure;Advanced Materials Technologies;2022-10-10
5. The Array of Silicon Nanowires Covered with Ag Nanoparticles by Atomic Layer Deposition and Their Optical Properties;SSRN Electronic Journal;2022
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3