Affiliation:
1. State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision Instrument Tsinghua University Haidian Beijing 100084 P. R. China
2. Key Laboratory of Advanced Materials (MOE) School of Materials Science and Engineering Tsinghua University Haidian Beijing 100084 P. R. China
3. State Key Laboratory of Integrated Optoelectronics College of Electronic Science and Engineering Jilin University 2699 Qianjin Street Changchun 130012 P. R. China
Abstract
Abstract3D laser nanoprinting represents a revolutionary manufacturing approach as it allows maskless fabrication of 3D nanostructures at a resolution beyond the optical diffraction limit. Specifically, it endows the printed structures novel physical, chemical, or mechanical properties not observed at macroscopic scale. However, 3D laser nanoprinting typically relies on the photopolymerization process, indicating its limitation on the printable materials and functionalities. The capability to print diverse functional materials beyond polymer will enable a lot of new device applications in nanophotonics, microelectronics, and so on. One of the strategies is to use the 3D‐printed polymer structures as skeletons for functional material deposition, while another is to mix the functional components with the photocurable molecules and print the nanocomposites. More recently, several laser nanoprinting techniques beyond photopolymerization are also developed. In this review, the cutting‐edge technical innovation is summarized and a couple of examples are highlighted showing exciting applications of the printed structures in magnetic microrobots, photonics, and optoelectronics. Finally, the vision for existing challenges and future development in this field is shared.
Funder
National Key Research and Development Program of China
State Key Laboratory of Precision Measurement Technology and Instruments
National Natural Science Foundation of China
Subject
Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials
Cited by
25 articles.
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