1. Light Technology Institute Karlsruhe Institute of Technology (KIT) Engesserstrasse 13 76131 Karlsruhe Germany
2. Institute of Microstructure Technology Karlsruhe Institute of Technology (KIT) Hermann‐von‐Helmholtz‐Platz 1 76344 Eggenstein‐Leopoldshafen Germany
3. Center for Functional Nanostructures Karlsruhe Institute of Technology (KIT) Wolfgang‐Gaede‐Strasse 1a 76131 Karlsruhe Germany
4. Zentrum für Sonnenenergie‐ und Wasserstoff‐Forschung Baden‐Württemberg (ZSW) Meitnerstr. 1 70563 Stuttgart Germany
5. Singulus Technologies AG Hanauer Landstrasse 103 D‐63796 Kahl/Main Germany